The number of research groups increased exponentially as well as Processes, treatments, and corresponding lasers has been developed for micro- and This changed at the latest with the advent of nano technology in general, with theīeginning of this millennium, and in the last 20 years an extreme diversity of Of room at the bottom.” However, the micro- and nano world was accessed by laserĪpplications only relatively late, and for decades there was practically only one nanoĪpplication of relevance, the use of excimer laser radiation for lithography, microchip making. Feynman said already in 1959: “There’s plenty Applications have been developed in and for all relevant markets of our modern society,Īnd the world would not exist as today without lasers.Īs Nobel Prize winner Richard P. Consequently, materials processing covering all gages and materials used in modernĮngineering got very popular and multibillion dollar markets became reality. Highest quality of energy ever seen in history and led to very high powers. Military applications promised unique characteristics of these devices with utmost These days of the beginning had laser cutting, drilling, and welding. In the 1970s, laser powers have been scaled to the kW-regimeĪnd corresponding applications were developed. Small average power devices have been investigated and step by step reached market
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This handbook is the first book covering the basics, the state-of-the-art and important applications of the dynamic and rapidly expanding discipline of laser micro- and nanoengineering. In particular, recent advances in ultrafast lasers have opened up a new avenue to laser material processing due to the capabilities of ultrahigh precision micro- and nanofabrication of diverse materials. Macro-processing based on thermal process using infrared lasers such as CO2 lasers has been the mainstream in the early stages, while research and development of micro- and nano-processing are becoming increasingly more active as short wavelength and/or short pulse width lasers have been developed. The main driving force behind this fact is that the lasers can provide unique solutions in material processing with high quality, high efficiency, high flexibility, high resolution, versatility and low environmental load. Lasers found application in materials processing practically since their invention in 1960, and are currently used widely in manufacturing. The book provides essential scientific and technical information to researchers and engineers already working in the field as well as students and young scientists planning to work in the area in the future. Each main part of the handbook is supervised by its own part editor(s) so that high-quality content as well as completeness are assured. Consisting of 11 sections, each composed of 4 to 6 chapters written by leading experts in the relevant field. This handbook provides a comprehensive review of the entire field of laser micro and nano processing, including not only a detailed introduction to individual laser processing techniques but also the fundamentals of laser-matter interaction and lasers, optics, equipment, diagnostics, as well as monitoring and measurement techniques for laser processing.